摘要 |
PROBLEM TO BE SOLVED: To provide a vibrator device which does not vary in resonance frequency even if ambient temperature varies. SOLUTION: A vibrator 201 of the vibrator device 901 is of a both-end supported beam structure made of two kind of materials, the one both-end supported beam structure being constituted by forming two mutually opposed cantilevers 220 and 221 of one material and connecting free ends of the two cantilevers 220 and 221 with the other material. COPYRIGHT: (C)2009,JPO&INPIT
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