METHOD OF FORMING METAL THIN FILM ON FRONT SURFACE OF POLYIMIDE RESIN

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a metal thin film excellent in an adhesion property on a front surface of polyimide resin without deforming any polyimide resin. SOLUTION: The method of manufacturing the metal thin film to the polyimide resin includes: a step of processing the front surface of the polyimide resin by alkaline solution to carry out a ring opening of an imido ring and of forming a modified layer; a step of processing the modified layer by metal ion-containing solution; a step of immersing the polyimide resin in first reducing agent solution; an immersion step of immersing the polyimide resin in water or aqueous solution which doesn't contain any reducing agent constituent; and a step of immersing the polyimide resin in second reducing agent solution. COPYRIGHT: (C)2009,JPO&INPIT