| 摘要 |
PROBLEM TO BE SOLVED: To generate a high-concentration ozone gas free of nitrogen oxides with a high degree of efficiency even when ultrapure oxygen having purity of not less than 99.9% is used as a source gas. SOLUTION: The ozone generating apparatus includes a pair of electrodes 11, 12 for producing discharge by the application of an AC voltage therebetween, and at least one dielectric 22 provided between the pair of electrodes. The source gas containing oxygen is provided into a discharge space 40 in which the discharge is produced to generate ozone by the action of the discharge. A surface lying between at least one of the pair of electrodes and the discharge space and in contact with the discharge has a surface resistivity of 10<SP>4</SP>Ωto 10<SP>11</SP>Ω. The source gas to be provided into the discharge space includes ultrapure oxygen having purity of not less than 99.9%. COPYRIGHT: (C)2009,JPO&INPIT
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