| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To verify exposure results by an exposure element provided to a reticle in advance. <P>SOLUTION: A CPU 7 refers to graphic data and coordinate information on an exposure element stored in a data file storage part 5 of a storage part 8, generates a panel layout element on a display panel corresponding to the exposure element, determines the positional relationship between a plurality of panel layout elements on the display panel, and thereby verifies whether the exposure element is an error. A display part 1 displays the verification results in a panel substrate window 9 or a reticle window 10. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
