| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a measuring method which enables the certain and accurate measurement of the pollution state of an optical observation device at the point of time of launching, and a measuring instrument. <P>SOLUTION: While allowing the environment in the exposure region at least partially surrounded by one side of a substrate to be measured to approach the environment in a predetermined region where a measuring target device is housed as near as possible, that is, while imitatively reproducing (imitating) the environment in the predetermined region in the exposure region within the measuring instrument, the air supplied into the predetermined region is introduced into the exposure region and it is measured whether the pollutant contained in the introduced air adheres to the substrate to be measured which forms the exposure region. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
