| 发明名称 |
PRODUCTION LINE MODULE FOR FORMING MULTIPLE SIZED PHOTOVOLTAIC DEVICES |
| 摘要 |
The present invention generally relates to a sectioning module positioned within an automated solar cell device fabrication system. The solar cell device fabrication system is adapted to receive a single large substrate and form multiple silicon thin film solar cell devices from the single large substrate.
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| 申请公布号 |
US2009077804(A1) |
申请公布日期 |
2009.03.26 |
| 申请号 |
US20080201840 |
申请日期 |
2008.08.29 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
BACHRACH ROBERT Z.;CHAE YONG-KEE;CHOI SOO YOUNG;DE VRIES NICHOLAS G.J.;ELGAR YACOV;ENGLHARDT ERIC A.;FREI MICHEL R.;GAY CHARLES;HAWKINS PARRIS;HO CHOI (GENE);HUNTER JAMES CRAIG;KANKANALA PENCHALA N.;LI LIWEI;LO WING HOO (HENDRICK);LU DANNY CAM TOAN;MEI FANG;MURPHY STEPHEN P.;PATEL SRUJAL (STEVE);SAUNDERS MATTHEW J.B.;SCHLEZINGER ASAF;SHENG SHURAN;SU TZAY-FA (JEFF);SULLIVAN JEFFREY S.;TANNER DAVID;TROWBRIDGE TERESA;WALKER BRICE;WHITE JOHN M.;WON TAE K. |
| 分类号 |
H01L31/18;B26F3/00;H01L21/304;H01L31/075 |
主分类号 |
H01L31/18 |
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