| 发明名称 |
APPARATUS AND METHODS FOR AMBIENT AIR ABATEMENT OF ELECTRONIC DEVICE MANUFACTURING EFFLUENT |
| 摘要 |
An abatement system is provided which includes 1) an abatement unit adapted to abate effluent; and 2) an ambient air supply system comprising an air moving device, wherein the ambient air supply system is adapted to supply ambient air to the abatement unit for use as an oxidant. Numerous other aspects are provided.
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| 申请公布号 |
US2009078656(A1) |
申请公布日期 |
2009.03.26 |
| 申请号 |
US20080053480 |
申请日期 |
2008.03.21 |
| 申请人 |
CURRY MARK W;PAGE BARRY;CRAWFORD SHAUN W;VERMEULEN ROBBERT;PYZEL WILLIAM D;LOLDJ YOUSSEF;CORREA RENE T;BROWN DANIEL S;FOX ALLEN |
发明人 |
CURRY MARK W.;PAGE BARRY;CRAWFORD SHAUN W.;VERMEULEN ROBBERT;PYZEL WILLIAM D.;LOLDJ YOUSSEF;CORREA RENE T.;BROWN DANIEL S.;FOX ALLEN |
| 分类号 |
C02F1/74 |
主分类号 |
C02F1/74 |
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