Diffractive optical element for operating wavelength for microelectronics, comprises binary structuring in subarea, and binary structuring comprises different strip densities at two positions of former subarea smaller than certain amount

摘要

The diffractive optical element comprises a binary structuring in a subarea. The binary structuring comprises different strip densities at two positions of the former subarea smaller than one divided by lambda. The binary structuring comprises different scanning ratios at the two positions. The difference of the different strip densities and the difference of the different scanning ratios amount to 0.1. An independent claim is included for a method for manufacturing a diffractive optical element.