发明名称 ASYMMETRIC FIELD EFFECT TRANSISTOR STRUCTURE AND METHOD
摘要 Disclosed are embodiments of an asymmetric field effect transistor structure (200a-c) and a method of forming the structure in which both series resistance in the source region (204, 304) (Rs) and gate (210, 310) to drain ((205, 305) capacitance (Cgd) are reduced in order to provide optimal performance (i.e., to provide improved drive current with minimal circuit delay) Specifically, different heights (214, 215) of the source (204) and drain regions (205) and/or different distances (351, 352) between the source (304) and drain regions (305) and the gate (210, 310) are tailored to minimize series resistance in the source region (204, 305) (i.e., in order to ensure that series resistance is less than a predetermined resistance value) and in order to simultaneously to minimize gate (210, 310) to drain (205, 305) capacitance (i.e., in order to simultaneously ensure that gate ( 210, 310) to drain (205, 305) capacitance is less than a predetermined capacitance value).
申请公布号 WO2009012276(A3) 申请公布日期 2009.03.26
申请号 WO2008US70102 申请日期 2008.07.16
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION;ANDERSON, BRENT, A.;BRYANT, ANDRES;CLARK, WILLIAM, F.;NOWAK, EDWARD, J. 发明人 ANDERSON, BRENT, A.;BRYANT, ANDRES;CLARK, WILLIAM, F.;NOWAK, EDWARD, J.
分类号 H01L21/335 主分类号 H01L21/335
代理机构 代理人
主权项
地址