SURFACE INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a surface inspection device capable of accurately detecting the data of the flaw or the like within the relatively wide range of the surface of an inspection target having unevenness in a state that its whole range is in focus. SOLUTION: The surface inspection device 1 is constituted so that the surface Ws of the inspection target W having unevenness is irradiated with light to get the reflected light from the surface Ws detected by a light receiving element 5 and to inspect the surface Ws of the inspection target W and equipped with a fiber bundle 4 composed a plurality of bundled optical fibers 41, constituted so that the fiber position (x, y) at an end part 4a on an input side and the fiber position (x*, y*) at an end part 4b on an output side are allowed to optically correspond to 1:1 and guiding the reflected light Lre from the surface Ws to the light receiving element 5. The end part 4a on the input side of the fiber bundle 4 is complementary with respect to the shape of the surface Ws of the inspection target W and formed into an equimultiple or similar shape. COPYRIGHT: (C)2009,JPO&INPIT