发明名称 INSPECTION DEVICE AND INSPECTION METHOD
摘要 PROBLEM TO BE SOLVED: To provide an inspection device capable of extracting image data containing the flaw of an inspection target from a large quantity of image data in a shorter time, and to provide an inspection method. SOLUTION: This inspection device has an imaging camera 30 for respectively imaging a plurality of the ranges shifted in a predetermined direction of the inspection target, an image processing part 40 for extracting a flaw signal showing the flaw of the inspection target in each of a plurality of the images captured the imaging camera 30 and a display part for displaying the processing result by the image processing part 40. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009063367(A) 申请公布日期 2009.03.26
申请号 JP20070230377 申请日期 2007.09.05
申请人 NIKON CORP 发明人 SAKAGUCHI TADASHI;TAKAHASHI MASASHI;WATABE TAKASHI
分类号 G01N21/956 主分类号 G01N21/956
代理机构 代理人
主权项
地址