| 摘要 |
PROBLEM TO BE SOLVED: To provide a visual inspection method of a color filter for specifying that foreign matter of the color filter exists on the back surface of a glass substrate in an inspection stage, and discriminating that it is not a defect in a process. SOLUTION: A density range and the number of determination thresholds of a colored pixel 22 or the like are set beforehand, and then the density of an inspection pixel of a defect D3 is determined, and a contour part R3 is set, and each concentration of contour inspection pixels is determined. When the mean value of the density of the defect is in a pertinent range and the minimum value is out of the pertinent range, the defect is determined to be a candidate of a back surface foreign matter. Then, each density of the contour inspection pixels is totalized in each density range, and when the number of the contour inspection pixels in the density range of the glass substrate is larger than the number of determination thresholds, the defect is determined to be on the glass substrate, and the defect is definitely determined to be a back surface foreign matter, and the defect is removed from defect objects in the process. COPYRIGHT: (C)2009,JPO&INPIT
|
