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发明名称
Verfahren zum Ausbilden einer Halbleiterstruktur mit einem Ausbilden von mindestens einer Seitenwandabstandshalterstruktur
摘要
申请公布号
DE102007030020(B4)
申请公布日期
2009.03.26
申请号
DE200710030020
申请日期
2007.06.29
申请人
ADVANCED MICRO DEVICES INC.
发明人
WIRBELEIT, FRANK;STEPHAN, ROLF;JAVORKA, PETER
分类号
H01L21/8238
主分类号
H01L21/8238
代理机构
代理人
主权项
地址
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