METHOD OF DESIGNING DRIVER, METHOD OF DESIGNING STAGE DEVICE, METHOD OF MANUFACTURING STAGE DEVICE, METHOD OF MANUFACTURING EXPOSURE APPARATUS AND STAGE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method of designing a stage device that achieves highly precise position control, a method of manufacturing same, a method of manufacturing exposure apparatus and the stage device.

SOLUTION: Y stage mass or moment of inertia around the center of gravity of the Y stage is determined so that the real part of a zero point has a minus value by obtaining a transfer function of a dynamic system including X stage and the Y stage moving on the X stage.

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