| 摘要 |
PROBLEM TO BE SOLVED: To provide a device which detects, in a short period of time, a quantity of phase change of an observation object from a differential interference image obtained by a differential interference microscope. SOLUTION: The device includes: a light source; the differential interference microscope having an illuminating optical system which splits light from the light source into two polarization components and guides them to the observation object and an image-forming system which recomposes the two polarization components into which the light has been split by the illuminating optical system, and forms an image of the observation object; a means for varying a quantity of retardation of each of the two polarization components; a means for detecting each quantity of retardation; and a means for picking up the image of the observation object, and the device uses an imaging means to pick up two differential interference images of the observation object, which are equal in the quantity of retardation and different in sign, wherein an operation means is provided. The operation means acquires subtraction image information and addition image information by performing a subtraction operation and addition operation for corresponding pixels in the two differential interference images, and detects a quantity of phase on the face of the observation object by using expression (1):δΦ(x,y)/δr=k×ä(1-cosθ)×D(x,y)}/ä2sinθ×S(x,y)}. COPYRIGHT: (C)2009,JPO&INPIT
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