发明名称 Abtrennungsverfahren von einem Geganstand und Abtrennungsvorrichtung
摘要 Laminate unit C obtained by fixing article B to support plate A through pressure sensitive adhesive double coated sheet 1 capable of being deformed by heating to thereby exert a detachment effect is held between a pair of sandwiching means, the sandwiching means so arranged as to enable interposition of the laminate unit C. The laminate unit C is heated by heating means 7 so that the pressure sensitive adhesive double coated sheet 1 is deformed to thereby reduce an area of contact of the pressure sensitive adhesive double coated sheet 1 with the article B with the result that the article B comes up from the pressure sensitive adhesive double coated sheet 1. Thereafter, the article B is detached from the pressure sensitive adhesive double coated sheet 1. Thus, there can be provided a method of detaching an article fixed through a pressure sensitive adhesive double coated sheet and a detachment apparatus therefor, which realize effective detachment of articles and ensure suitability to processing by an automatic line. <IMAGE>
申请公布号 DE60038265(T2) 申请公布日期 2009.03.26
申请号 DE2000638265T 申请日期 2000.06.15
申请人 LINTEC CORP. 发明人 KUROKAWA, SHUJI;KOBAYASHI, KENJI
分类号 H01L21/00;H01L21/67;B65H41/00;H01L21/02;H01L21/683 主分类号 H01L21/00
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