| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device capable of detecting a fine defect of a measuring object. SOLUTION: The device includes a capacitive sensor 15 for measuring a capacitance of the measuring object (a resist film 12 provided on a semiconductor wafer 10), and a length measuring sensor 20 (a measuring light source 21, a light receiving part 22) for measuring a distance between the bottom surface of the measuring object and the capacitive sensor. COPYRIGHT: (C)2009,JPO&INPIT
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