INKJET HEAD, AND MANUFACTURING METHOD FOR INKJET HEAD

摘要

PROBLEM TO BE SOLVED: To provide an inkjet head improved in adhesiveness between a protecting film formed on a piezoelectric substrate and an adhesive which sticks a nozzle plate. SOLUTION: The protecting film 26 which protects the piezoelectric substrate 18 is formed at the piezoelectric substrate 18 of the inkjet head 10. A patterned recess 62 is formed on the surface of the protecting film 26 of a face to which the nozzle plate 17 is adhered. The nozzle plate 17 is stuck by applying the adhesive 24 to the protecting film 26 surface having the recess 62. COPYRIGHT: (C)2009,JPO&INPIT