发明名称 |
PICK AND PLACE SYSTEM FOR A SEMICONDUCTOR ASSEMBLY DEVICE |
摘要 |
The invention relates to a semiconductor assembly device comprising a pick and place system (7) with a bond head (8), provided with a first drive system (13) and a second drive system (14) for displacing the bond head (8) in a predetermined direction. The first drive system (13) comprises a first pivoting arm (16) and a first stationary drive (19) which serves to pivot back and forth the pivoting arm (16) within a predefined pivoting range. The second drive system (14) is mounted on the pivoting arm (16) and comprises a stationary electric motor (44). |
申请公布号 |
WO2009037108(A2) |
申请公布日期 |
2009.03.26 |
申请号 |
WO2008EP61589 |
申请日期 |
2008.09.03 |
申请人 |
OERLIKON ASSEMBLY EQUIPMENT AG, STEINHAUSEN;ETTER, FLORENTIN |
发明人 |
ETTER, FLORENTIN |
分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|