发明名称 PICK AND PLACE SYSTEM FOR A SEMICONDUCTOR ASSEMBLY DEVICE
摘要 The invention relates to a semiconductor assembly device comprising a pick and place system (7) with a bond head (8), provided with a first drive system (13) and a second drive system (14) for displacing the bond head (8) in a predetermined direction. The first drive system (13) comprises a first pivoting arm (16) and a first stationary drive (19) which serves to pivot back and forth the pivoting arm (16) within a predefined pivoting range. The second drive system (14) is mounted on the pivoting arm (16) and comprises a stationary electric motor (44).
申请公布号 WO2009037108(A2) 申请公布日期 2009.03.26
申请号 WO2008EP61589 申请日期 2008.09.03
申请人 OERLIKON ASSEMBLY EQUIPMENT AG, STEINHAUSEN;ETTER, FLORENTIN 发明人 ETTER, FLORENTIN
分类号 H01L21/00 主分类号 H01L21/00
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