发明名称 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 This invention includes a method for manufacturing a semiconductor device by which implementation of a finer pitch for a semiconductor chip (10) can be handled, and the creation of voids inside an under-filling resin can be reduced in order to realize highly reliable flip-chip mounting. It involves a step in which multiple electrodes arranged two-dimensionally on one side of a semiconductor chip are connected to corresponding conductive regions on a substrate (16); a step in which an under-filling resin (20) is injected between the one surface of the semiconductor chip and the substrate; and a step in which the under-filling resin is melted at a temperature higher than its glass transition temperature while under a prescribed pressure and cured.
申请公布号 WO2009009566(A3) 申请公布日期 2009.03.26
申请号 WO2008US69479 申请日期 2008.07.09
申请人 TEXAS INSTRUMENTS INCORPORATED;MASUMOTO, MUTSUMI 发明人 MASUMOTO, MUTSUMI
分类号 H01L21/56;H01L21/60 主分类号 H01L21/56
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