METHOD OF PRODUCING A LAYER BY ARC-EVAPORATION FROM CERAMIC CATHODES

摘要

The present invention relates to a method of producing hard wear resistant layer with improved wear resistance. The method is a reactive arc-evaporation based process using a cathode comprising as main constituent at least one phase of a refractory compound Mn+iAXn (n = 1, 2 or 3), wherein M is one or more metals selected from the groups IIIB, IVB, VB, VIB and VIIB of the periodic table of elements, A is one or more elements selected from the groups IIIA, IVA, VA and VIA of the periodic table of elements, and wherein X is carbon and/or nitrogen.