ELECTROSTATIC CHUCK WITH HEATER,申请号KR20070072164-传众专利搜索

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发明名称	ELECTROSTATIC CHUCK WITH HEATER
摘要
申请公布号	KR100890414(B1)	申请公布日期	2009.03.26
申请号	KR20070072164	申请日期	2007.07.19
申请人		发明人
分类号	H01L21/687	主分类号	H01L21/687
代理机构		代理人
主权项
地址

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