| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To reduce the amount of impurities in a film in a photoelectric conversion layer while suppressing problems, such as the generation of a region insufficient in degassing, generation of wrinkles of a substrate, dimensional change or the like in preliminary heating process. <P>SOLUTION: The device for manufacturing the photoelectric conversion element includes a preliminary heating chamber 203 for heating a flexible substrate 200 to degass before preparing a film of photoelectric converting layer regularly and a plurality of independent film making chambers 202 for making a multi-layer photoelectric converting layers 1d on the flexible substrate 200 in a common chamber 205 including a vacuum chamber, as shown in Fig. 14, while a heater temperature and a gas pressure, which are higher than the heater temperature and the gas pressure in the film making chamber 202 for making the layer having the highest substrate temperature out of the photoelectric converting layers 1d to be subjected to film formation in the film making chambers 202, are set upon preliminary heating in the preliminary heating chamber 203. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
