| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric element having high piezoelectric characteristics and a high durability. <P>SOLUTION: The piezoelectric element 12 has a piezoelectric film 18 which expands or contracts by a change in voltage to be applied thereto, a first electrode 16 disposed on one surface of the piezoelectric film, and a second electrode 20 disposed on the surface opposite to the surface where the first electrode of the piezoelectric film is disposed. The piezoelectric film mainly consists of Pb<SB>x</SB>B<SB>y</SB>O<SB>z</SB>formed on the second electrode by vapor phase growth, where x/y of a portion separated by 100 nm in a direction toward the first electrode from the contact face with the second electrode is not less than 0.8 nor more than 1.6 and B is formed of at least one element from among Ti, Zr, V, Nb, Ta, Cr, Mo, W, Mn, Sc, Co, Cu, In, Sn, Ga, Zn, Cd, Fe, Ni and lanthanide elements, and the conditions 0<x≤1, 0<y≤1, 2.5<z≤3 are satisfied. <P>COPYRIGHT: (C)2009,JPO&INPIT |
