| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a diffuser support member which prevents droop, creep generation, movement, and/or crack in a diffuser caused by being exposed to a high treatment temperature, gravity, and other powers. <P>SOLUTION: One or more diffuser support members 160 are moveably disposed in each opening 165 of a backing plate 112 and are coupled to a diffuser 110. The diffuser support members 160 are coupled to a frame structure 175. A material of the diffuser support members 160 has strength enough to support the diffuser 110. <P>COPYRIGHT: (C)2009,JPO&INPIT |
