| 摘要 |
PROBLEM TO BE SOLVED: To collect necessary process data concerning a semiconductor manufacturing device without any hindrance to production management that a host computer performs. SOLUTION: A data collection method includes: receiving from the host computer setting information (first information) for setting items of an event and a variable that the manufacturing device has to output; comparing the item of the variable included in the first information with items of an event and a variable included in setting information (second information) for setting the item of the event as a trigger of process data to be collected and the item of the variable; generating information with items of a deficient variable and event as additional items; generating, on the basis of the additional items, information (third information) for setting the manufacturing device so as to output a message including the additional event and variable and transmitting the third information to the manufacturing device; preempting the transmission contents that the manufacturing device has output directed to the host computer; and changing the preempted transmission contents into transmission contents corresponding to only the first information and outputting the changed transmission contents to the host computer. COPYRIGHT: (C)2009,JPO&INPIT
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