| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device capable of also detecting a color irregularity flaw with sensitivity, simultaneously with undulation, fine unevenness or foreign matters and a crack-like flaw, in an inspection optical system using a telecentric optical system, and to provide an inspection method. SOLUTION: In the inspection device equipped with an optical element for guiding the irradiation light from a white spot light source to an inspection target to make the reflected light which returns from the surface of the inspection target converge, and the aperture iris arranged at the after-image space focal plane position of the optical element; and an image detection means for detecting the image of the reflected image passing through the aperture iris, the aperture iris is constituted, by arranging a plurality of color filters different in transmission wavelength band in a concentric circular state, wherein the image detection means has a flaw detection means which receives light, in a state where the light transmitted through a plurality of the color filters is separated and detects flaws from the independent image and combined image obtained by the image detection means. COPYRIGHT: (C)2009,JPO&INPIT
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