| 摘要 |
A method for determining the surface quality of a substrate passing from an initial state into a converted state during a conversion process including the steps of acquiring first information relating to surface defects detected on the initial substrate, acquiring second information relating to surface defects detected on the converted substrate, of processing the first information and the second information, and of classifying the converted substrate as a function of the first acquired information relating to the surface defects detected on the initial substrate and as a function of the second acquired information relating to the surface defects detected on the converted substrate.
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