发明名称 |
CORRUGATED THERMAL ACTUATOR |
摘要 |
A thermal actuator for micro mechanical or micro electro-mechanical devices comprises a supporting substrate; an actuator extension portion; an anchor block extending from the substrate; a first group of at least two elongate corrugated arms attached at a first end thereof to a heating circuit at the anchor block and at a second end to the extension portion, the first group being arranged to be conductively heated through connection to the heating circuit; and a second group of at least two elongate corrugated arms attached at a first end to the anchor block and at a second end to the extension portion, the second group not being connected to a heating circuit and being spaced apart from the first group. The first edge of the at least two elongate corrugated arms of the first group and a first edge of the at least two elongate corrugated arms of the second group are in a common plane.
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申请公布号 |
US2009077962(A1) |
申请公布日期 |
2009.03.26 |
申请号 |
US20080276379 |
申请日期 |
2008.11.23 |
申请人 |
SILVERBROOK RESEARCH PTY LTD |
发明人 |
SILVERBROOK KIA |
分类号 |
F03G7/06;F01B29/10;F02G1/04;G11B5/55;G11B21/08 |
主分类号 |
F03G7/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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