发明名称 WORKING AMOUNT PREDICTION METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a working shape prediction method which can accurately predict a working shape corresponding to a working condition, when working conditions are given. <P>SOLUTION: In step S11, a model formula including a correction coefficient, i.e. the model formula of a working shape, which is determined corresponding to a prescribed working condition, is made. Next, in step S12, a simple working condition is set and working is performed. Successively, in step S13, the working shape is measured. In addition, in step S14, the correction coefficient is identified so that the working shape, calculated by the model formula, becomes similar to an actually obtained working shape. Then, in step S15, the working shape corresponding to the given working condition is estimated by using the model formula identified in the step S15. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009065213(A) 申请公布日期 2009.03.26
申请号 JP20080324552 申请日期 2008.12.19
申请人 NIKON CORP 发明人 CHIGA TATSUYA;USHIO KAJIRO
分类号 H01L21/304;B24B37/07 主分类号 H01L21/304
代理机构 代理人
主权项
地址