| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspecting device and method for accurately inspecting a surface condition while detecting defects on an inspected object ranging over neighboring main scanning lines or ranging over neighboring picture elements on the main scanning lines and over the neighboring main scanning lines. SOLUTION: Image data which is obtained by using a camera 11 having a line image sensor 13 for scanning on the inspected object 10 is input to an arithmetic processing means 16. A line memory 17 and an adder 18 are used for adding the image data on the two neighboring main scanning lines to generate an image data string. An arithmetic processor 19 is used for adding the image data in a block consisting of a plurality of picture elements continued in the main scanning direction to generate in-block addition data. A correlation value for the in-block addition data neighboring each other in the main scanning direction is calculated. A determining means 20 determines the correlation value as a threshold value. COPYRIGHT: (C)2009,JPO&INPIT
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