发明名称 |
METHOD AND APPARATUS FOR MANAGING MANUFACTURING EQUIPMENT, METHOD FOR MANUFACTURING DEVICE THEREBY |
摘要 |
Provided is a method for managing manufacturing apparatuses used in a managed production line including a plurality of manufacturing processes for manufacturing an electronic device, each of the apparatuses being used in each of the processes, the method including: acquiring a property of a reference device manufactured in a predetermined reference production line including the manufacturing processes to be performed; performing at least one of the manufacturing processes in the managed production line, performing the other manufacturing processes in the reference production line, and manufacturing a comparison device; measuring a property of the comparison device; comparing the measured properties between the reference and the comparison devices; and judging whether the manufacturing apparatus used in the at least one manufacturing process is defective or not, based on a property difference between the reference and the comparison devices.
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申请公布号 |
US2009081819(A1) |
申请公布日期 |
2009.03.26 |
申请号 |
US20080055310 |
申请日期 |
2008.03.25 |
申请人 |
ADVANTEST CORPORATION;NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY |
发明人 |
OKAYASU TOSHIYUKI;SUGAWA SHIGETOSHI;TERAMOTO AKINOBU |
分类号 |
H01L21/66;B08B5/00;B08B7/04;B08B13/00;C23C14/34;C23C16/00;C23F1/08;C25D5/00;C25D17/00;G03B27/52;G03F7/20;G05B19/418;H01L21/02 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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