发明名称 MICROMECHANICAL COMPONENT AND METHOD FOR OPERATING A MICROMECHANICAL COMPONENT
摘要 The invention relates to a micromechanical component and a method for operating a micromechanical component. The micromechanical component comprises a stationary structure and a seismic mass, the stationary structure having first electrodes and the seismic mass having second electrodes. The seismic mass is mobile relative to the stationary structure in a main direction of movement that is parallel to the direct connecting line of the seismic mass with the stationary structure in a main plane of extension of the stationary structure. In a rest position of the seismic mass, the first electrodes and the second electrodes are interspaced in such a manner that there is no overlap of the first electrodes relative to the second electrodes in a first direction that is perpendicular to the main direction of movement in the main plane of extension and such an overlap only occurs in a state of deflection.
申请公布号 WO2009010355(A3) 申请公布日期 2009.03.26
申请号 WO2008EP57553 申请日期 2008.06.16
申请人 ROBERT BOSCH GMBH;CLASSEN, JOHANNES 发明人 CLASSEN, JOHANNES
分类号 B81B3/00 主分类号 B81B3/00
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