| 摘要 |
PROBLEM TO BE SOLVED: To provide a solid-sate image pickup element for remarkably suppressing variation of a pixel size and a shape of a color filter, reducing influence to picture quality and color unevenness, remarkably suppressing occurrence of residue and reducing influence to color unevenness even in the solid-state image pickup element having the pixel size of not more than 3.5μm, and 3.0μm in addition. SOLUTION: In the solid-state image pickup element, at least a light receiving element, a planarized layer, a color filter, a transparent resin layer and a micro lens in two-dimensional arrangement on the transparent resin layer are sequentially laminated on a semiconductor substrate. The color filter is formed on a photosensitive resin film comprising pigment, which is formed on the planarized layer as film coating, by exposure, development and hardening. A reflection factor in wavelength of 365 nm of the planarized layer, which is defined by a value obtained by multiplying a transmission factor at wavelength of 365 nm of the color filter and a square of a transmission factor at wavelength of 365 nm of the planarized layer, is not more than 2%. COPYRIGHT: (C)2009,JPO&INPIT
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