SUBSTRATE HOLDER MECHANISM WITH DRESSER, AND METHOD FOR GRINDING SUBSTRATE USING THE MECHANISM

摘要

PROBLEM TO BE SOLVED: To provide a method for conducting surface grinding of a substrate and dressing of a grinding wheel at the same time. SOLUTION: By using: a substrate holder mechanism with a dresser whose circle center is coaxial with that of an annular dresser wheel 6 provided on the outer periphery of a disk-like substrate holder table 4 through a height adjusting mechanism; and a grinding head equipped with a cup-shaped grinding wheel 50, a surface of the substrate 3 mounted on the rotating disk-like substrate holder table 4 is ground by feeding the cup-shaped grinding wheel 50 to the substrate 3. As biasing force by a spring of the height adjusting mechanism acts upward with respect to a bottom surface of the annular dresser wheel 6, a ground surface position of the substrate during substrate grinding is made flush with a top surface position of the annular dresser wheel 6. COPYRIGHT: (C)2009,JPO&INPIT