发明名称 |
APPARATUS AND METHODS FOR TRANSPORTING AND PROCESSING SUBSTRATES |
摘要 |
There is described apparatus and methods for transporting and processing substrates including wafers as to efficiently produce at reasonable costs improved throughput as compared to systems in use today. A key element is the use of a transport chamber along the sides of processing chambers for feeding substrates into a controlled atmosphere through a load lock and then along a transport chamber as a way of reaching processing chambers and then out of the controlled atmosphere following processing in the processing chambers.
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申请公布号 |
US2009078374(A1) |
申请公布日期 |
2009.03.26 |
申请号 |
US20080325993 |
申请日期 |
2008.12.01 |
申请人 |
INTEVAC, INC. |
发明人 |
BLUCK TERRY;FAIRBAIRN KEVIN P.;BARNES MICHAEL S.;LANE CHRISTOPHER T. |
分类号 |
C23F1/08;C23C14/34;C23C14/48;C23C16/00;F16J12/00 |
主分类号 |
C23F1/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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