摘要 |
Provided is a microscope for focusing by inserting a split prism (5) at a focusing support time. The image of an iris stop (30) is branched into such two images by the angle deflecting action of the split prism (5) as are individually shifted and focused at symmetric positions across the optical axis of the microscope. These two branched images of the iris stop (30) are further focused on an objective lens (23) through a beam splitter (22) by the focusing action of a lens (21). The operation unit of a vertical motion device is operated to move an optical system up and down so that the images of a focused pattern (16) are viewed to move in opposite directions from each other in the field of view. At the focusing time when the focal position of the objective lens (23) is focused on a sample face (24), the images of the focused pattern (15) look in the registered state. Thus, the focusing action can be made highly precise without being restricted by the magnification or NA of the objective lens.
|