FLOW METER AND FLOW-REGULATING SYSTEM USING THE SAME

摘要

Provided are a flow meter and a flow-rate control system using the same that is capable of measuring a flow rate in a minute flow-rate region with excellent measurement accuracy by preventing or suppressing the generation of bubbles and in which accumulation of the fluid and the bubbles is less likely to occur. The flow meter is for measuring a minute flow rate of a fluid flowing through a fluid channel whose outlet environment is set to constant pressure, the flow meter including a flow-rate measurement conduit portion having a predetermined length connected to an outlet-side end of the fluid channel 1 and whose outlet environment is set to constant pressure by setting the cross-sectional area of a channel smaller than the fluid channel; a pressure sensor for detecting the pressure of the fluid at the upstream side of the flow-rate measurement conduit portion by being disposed near an outlet of the fluid channel 1; and a pressure-detection control unit 4 for calculating a flow rate from a fluid pressure detected at the pressure detection part.