| 摘要 |
A method for producing an actuator device includes forming a lower electrode above a substrate, forming thereon a piezoelectric layer including multiple piezoelectric films by repeatedly sintering a piezoelectric precursor film containing titanium, zirconium, and lead, and forming an upper electrode above the piezoelectric layer. A titanium seed layer is formed above the lower electrode and a piezoelectric precursor film is crystallized by sintering to form a first piezoelectric layer above the titanium seed layer. An intermediate titanium seed layer is formed above the first piezoelectric layer and a piezoelectric precursor film is crystallized by sintering, forming a second piezoelectric layer above the intermediate titanium seed layer. At least one piezoelectric precursor film is stacked above the second piezoelectric layer and crystallized by sintering at a temperature higher than a temperature at which the first and second piezoelectric layers are formed, thereby forming a third piezoelectric layer.
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