| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an ashing apparatus wherein a decrease in processing efficiency is suppressed. <P>SOLUTION: A metal blocking plate 34 acting as a porous plate is arranged between a shower plate 31 for diffusing oxygen radicals supplied into a chamber 11 and a substrate stage 20 on which a substrate W is placed. The metal blocking plate 34 has a first layer, made of a metal oxide layer, on the introducing side of the oxygen radicals, and a second layer, made of a metal exposed in the substrate W processed in the chamber 11, on the side facing the substrate W, and has a through hole through which oxygen radicals pass. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
