| 摘要 |
PROBLEM TO BE SOLVED: To efficiently store/retrieve loads or efficiently carry the loads inside a storage by a simple configuration, in the storage such as a stocker for temporarily storing loads such as FOUPs for storing various types of substrates for semiconductor device manufacturing. SOLUTION: The storage (10) is provided with a support part (11) capable of supporting loads (3); a horizontal drive part (13) capable of reciprocating the support part (11) in one horizontal direction; a vertical drive part (14) capable of reciprocating a placement part in the vertical direction; and shelves (15) provided by one or two or more at a plurality of stages in the vertical direction at which the support part (11) can arrive by the vertical drive part (14) and in the horizontal position at which the support part (11) can arrive by the horizontal drive part (13), and having a plurality of placement surfaces constituted so as to enable transfer of the loads (3) mutually with the support part (11), respectively. At least one of the plurality of placement surfaces functions as a port for load storing/retrieving. COPYRIGHT: (C)2009,JPO&INPIT
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