| 摘要 |
PROBLEM TO BE SOLVED: To provide a table device of a planar bearing type in which a retainer does not excessively lower by gravity, even if vertically placed, by preventing the retainer from excessively lowering by the gravity. SOLUTION: The table device comprises a base having an upper surface and a lower surface formed to be flat planes parallel to each other, two planar ball bearings provided across the upper and lower surfaces of the base, and a movable carriage for sandwiching the two planar ball bearings from the upper and lower surfaces and moving them in at least two orthogonal X and Y directions. Each of the two planar ball bearings has the flat retainer having numerous holding holes bored and numerous spherical objects held in the holding holes. The table device is characterized in that it has an interlock mechanism for forcibly moving the retainer by a half of a travel of the movable carriage by the movement of the carriage. COPYRIGHT: (C)2009,JPO&INPIT
|
