| 摘要 |
There is provided a flow sensor configured as described below. The flow sensor 11 is formed by bonding a sensor chip 12 formed with a flow rate detecting part 23 and a flow path forming member 15 that is provided on the sensor chip and is formed with a flow path for a fluid flowing in the flow rate detecting part to each other on the upper surface of a substrate 21. The flow path forming member is formed by bonding a transparent first flow path forming member 14 and a second flow path forming member 15 to each other. The first flow path forming member has a plate shape, and is provided with an inflow port 14c and a outflow port 14d for the fluid to be measured, and the second flow path forming member has a plate shape, and is provided with a through hole 15c that forms the flow path along the flow of the fluid flowing along.the flow rate detecting part. Both ends of the through hole communicate with the inflow port and the outflow port, and the flow rate detecting part is arranged in the through hole between the portions corresponding to the inflow port and the outflow port to form the flow path having a predetermined cross-sectional area, whereby the fabrication accuracy of the cross-sectional area of sensor flow path is enhanced, and thereby the flow rate detection accuracy is stabilized. |
