发明名称 HANDLER, METHOD OF MANUFACTURING SEMICONDUCTOR USING THE SAME, AND METHOD OF TRANSFERRING TEST-TRAY
摘要 A handler, method of manufacturing semiconductor using the same is provided to reduce manufacturing cost of the semiconductor device by perform loading and unloading of the semiconductor device without minimizing the size of the handler. A test tray receives a plurality of semiconductor devices and a connection unit(101) for the electrical connection is installed at the circumference of the test tray. The connection unit connecting the connection unit and semiconductor device is equipped. A rotator(3) rotates while maintaining the test tray horizontal, a loading unit(7) receives the semiconductor device tested in the test tray. An unloader(8) separates the semiconductor device which is test completed from the test tray. A first chamber(21) controls the semiconductor device which is accepted in the test tray tested by the test temperature.
申请公布号 KR20090030743(A) 申请公布日期 2009.03.25
申请号 KR20070096256 申请日期 2007.09.21
申请人 MIRAE CORPORATION 发明人 BEOM, HEE RAK;KIM, KYUNG TAE
分类号 G01R31/26;H01L21/66 主分类号 G01R31/26
代理机构 代理人
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