| 摘要 |
An apparatus for testing a substrate and a method thereof are provided to test whether a substrate has a defect at once without respect to each substrate. A substrate size sensor(11) is on a floor surface of a holder for testing a substrate(1) to test the substrate(5). And a substrate monitoring unit(3) is reacted to change a path in the holder for testing the substrate. The substrate size sensor is arranged by a predetermined interval on the floor surface of the holder for testing the substrate. The substrate size sensor senses a size per a substrate to determine a moving path. A reflector(2) is equipped in an end of a vertical part of the holder for testing the substrate. The reflectors are equipped in respective X-axis and Y-axis. The substrate monitoring unit is on an upper portion of the holder for testing the substrate to finely test the front surface of the holder for testing the substrate. |
