| 发明名称 |
METHOD FOR PRODUCTION OF THIN-FILM STAIN ELEMENTS |
| 摘要 |
A method for production of thin-film stain-elementscomprises the stage of application of thin metal films on dielectric pad with method of spraying in vacuum and subsequent stage of processing. Processing of heterostructure with film carried out at room temperatures in one stage in atmosphere electric-neutral atomic hydrogen in vacuum plant. |
| 申请公布号 |
UA40096(U) |
申请公布日期 |
2009.03.25 |
| 申请号 |
UA20080012317U |
申请日期 |
2008.10.20 |
| 申请人 |
ZAPORIZHIA NATIONAL TECHNICAL UNIVERSITY |
发明人 |
MATIUSHYN VOLODYMYR MYKHAILOVYCH;ZHAVZHAROV YEVHEN LEONIDOVYCH;ANTONCHENKO NINA ANATOLIIVNA |
| 分类号 |
C23C14/06;C23C14/58 |
主分类号 |
C23C14/06 |
| 代理机构 |
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代理人 |
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| 主权项 |
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