| 摘要 |
A method of testing a semiconductor device is provided to place test trays inside a test chamber in a horizontal direction, thereby continuously performing test processes and reducing time spent for loading or unloading the test trays. The first test tray(30a) in which the first semiconductor devices are contained is loaded to a test chamber(124). The first test tray is located inside the test chamber in a horizontal direction. The first test tray is connected to a tester. The first semiconductor devices are tested by applying a test signal provided from the tester to the first semiconductor devices through signal lines of the first test tray. The first test tray is unloaded from the test chamber. If the test process about the first semiconductor devices is terminated, a test process about the second semiconductor devices contained in the second test tray(30b) is started. |
