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发明名称
MIXTURE OF OLIGOMERIC PHENAZINIUM COMPOUNDS AND ACID BATH FOR ELECTROLYTICALLY DEPOSITING A COPPER DEPOSIT
摘要
申请公布号
EP1592825(B1)
申请公布日期
2009.03.25
申请号
EP20030813565
申请日期
2003.12.09
申请人
ATOTECH DEUTSCHLAND GMBH
发明人
BRUNNER, HEIKO;DAHMS, WOLFGANG;MORITZ, THOMAS;GRIESER, UDO;OEZKOEK, AKIF
分类号
C25D3/38;C25D7/12;H01L21/288;H05K3/42
主分类号
C25D3/38
代理机构
代理人
主权项
地址
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