Binary sinusoidal sub-wavelength gratings as alignment marks,申请号EP20060255897-传众专利搜索

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发明名称	Binary sinusoidal sub-wavelength gratings as alignment marks
摘要
申请公布号	EP1788451(B1)	申请公布日期	2009.03.25
申请号	EP20060255897	申请日期	2006.11.17
申请人	ASML NETHERLANDS B.V.	发明人	VAN HAREN, RICHARD JOHANNES FRANCISCUS;MUSA, SAMI
分类号	G03F9/00	主分类号	G03F9/00
代理机构		代理人
主权项
地址

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