| 摘要 |
The pump (100) has a gas inlet and a fast-rotating rotor (124), where the rotor is connected with a flange (118) of a multi-chamber vacuum system (101). The flange is provided with suction openings that are separated by a separating wall (106). A gas path separation structure is arranged in the gas inlet, where the structure is designed such that structure causes sealing of vacuum chambers (102, 103) of the multi-chamber vacuum system together with the separating wall. A central disk (129) forms the gas path separation structure together with bars (127, 128). |
